The MarSurf UD 120 from Mahr can generate both surface and contour measurements in a single pass. Designed for economy, even at high tolerances, this compact system, which is based on the MarSurf LD 120 system, provides high accuracy measurements over a large measuring range in nanometre resolutions.
The MarSurf UD 120’s drive unit enables lengths from 0.1 mm to 120 mm to be traversed at drive speeds between 0.1 and 2 mm/s, with a glass scale in the X-direction allowing automatic positioning. Probe motion is sensed by an optical measuring system based on a rocker-arm principle that has the stylus tip located on one end and an interferometer on the other. Movement is registered by photo diodes and evaluated electronically. This innovative measuring method enables the UD 120 to achieve a very high resolution over a large range.
The probe measuring range is 10-20 mm, and the unit's standard LD A14-102/60° diamond probe yields a Z-axis resolution of 2 nm and a residual Rz0 value of 60 nm. Different probe geometries are also available for customer applications.